Product
Introduction

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Wheel,Pad

Bit-Refined Diamond Wheel

Bit-refined diamond wheels are abrasive wheels containing diamond particles that can effectively polish advanced semiconductor materials such as silicon carbide and gallium nitride.

특성
Reduce wear and tear
Stable continuous machining
Reduce damage depth
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VMH Wheel

The VMH wheel is a polishing wheel that uses high density diamond particles to effectively polish abrasive materials such as silicon carbide, a semiconductor material.
This tool is an essential part in the enhancement of wafer surface quality and the assurance of precision and consistency in the polishing process.

Bit-refined diamond wheel

Bit-refined diamond wheels are designed to withstand high temperatures, resist wear,
and provide excellent grinding performance, making them ideal for precision machining applications.
Wheels are also frequently employed as CBN wheels and are suitable for precision machining.
Large number of pores provide excellent cooling.

Axis rpm 2,500 rpm S.O. 10 sec
Table rpm 300 rpm Slow up 0.3 ㎛ / sec 60 sec
Feed rate 0.3 ㎛/s Grinding water Flow rate
Polishing table 10 ㎛ Tap water 5.0 L/min
Flat Grinding Process (Finishing)
Whetstone grit SD
Grain size 8000 size
Size Wheel diameter D(mm) Width of grinding wheel W(mm)
200 ~ 300 3 ~ 4
Shape Cup-shaped Wheel
6inch

Complete

8inch

Complete